METAL VAPOR VACUUM-ARC ION SOURCES RADUGA

被引：20

作者：

RYABCHIKOV, AI

DEKTJAREV, SV

STEPANOV, IB

机构：

[1] Tomsk Polytechnic University

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 10期

关键词：

D O I：

10.1063/1.1144766

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A brief review is presented of the ''Raduga'' 1-4 repetitively pulsed metal vapor vacuum arc ion sources. Their operation principles and functional ranges are described. The Raduga ion sources provide single- and multi-element implantation. These advantages are achieved by using not only pure single-element or mixed ion fluxes, but also pulsed beam sequences with controllable composition and energy of each ion species. Another feature of the ion sources is their ability to generate a sequence of ion beam and plasma stream pulses. Switching between ion irradiation and plasma deposition can be done from pulse to pulse, within each pulse, or after accumulation of a required dose. Some specific features of the emission properties of broad beam metal vapor vacuum arc ion sources are described.

引用

页码：3126 / 3134

页数：9

共 30 条

[1] REPETITIVELY PULSED METAL-ION BEAMS FOR ION-IMPLANTATION [J].

ADLER, RJ ;

PICRAUX, ST .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :123-128

[2]

AKSENOV AI, 1987, PRIB TEKH EKSP, P139

[3]

Arzubov, 1988, PRIB TEKH EKSP, V5, P28

[4]

ARZUBOV NM, 1989, IZVEST VUSOV FIS, V8, P68

[5]

ARZUBOV NM, 1991, PRIB TECHN EXP, V1, P171

[6]

ARZUBOV NM, 1990, Patent No. 1395024

[7] HIGH-CURRENT ION-SOURCE [J].

BROWN, IG ;

GAVIN, JE ;

MACGILL, RA .

APPLIED PHYSICS LETTERS, 1985, 47 (04) :358-360

[8] THE 100-KV GAS AND METAL-ION SOURCE FOR HIGH-CURRENT ION-IMPLANTATION [J].

BUGAEV, SP ;

NIKOLAEV, AG ;

OKS, EM ;

SCHANIN, PM ;

YUSHKOV, GY .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04) :2422-2424

[9]

Didenko A.N., 1984, PISMA ZH TEKH FIZ, P112

[10]

HIAOJI Z, 1992, REV SCI INSTRUM, V63, P2431

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