OPTICAL-PROPERTIES OF ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：151
作者：
MINAMI, T
NANTO, H
TAKATA, S
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 08期
关键词：
D O I：
10.1143/JJAP.24.L605
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L605 / L607
页数：3
相关论文
共 23 条
[11]   HIGHLY TRANSPARENT AND CONDUCTING INDIUM-DOPED ZINC-OXIDE FILMS BY SPRAY PYROLYSIS [J].
MAJOR, S ;
BANERJEE, A ;
CHOPRA, KL .
THIN SOLID FILMS, 1983, 108 (03) :333-340
[12]   MANY-BODY EFFECTS IN RADIATIVE EMISSION-SPECTRUM OF SEMICONDUCTORS [J].
MENESES, EA ;
LUZZI, R .
SOLID STATE COMMUNICATIONS, 1973, 12 (06) :447-450
[13]   HIGHLY CONDUCTIVE AND TRANSPARENT ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING IN AN APPLIED EXTERNAL DC MAGNETIC-FIELD [J].
MINAMI, T ;
NANTO, H ;
TAKATA, S .
THIN SOLID FILMS, 1985, 124 (01) :43-47
[14]   HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD [J].
MINAMI, T ;
NANTO, H ;
TAKATA, S .
APPLIED PHYSICS LETTERS, 1982, 41 (10) :958-960
[15]   HIGHLY CONDUCTIVE AND TRANSPARENT ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].
MINAMI, T ;
NANTO, H ;
TAKATA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L280-L282
[16]   PHOTOLUMINESCENCE FROM UU-DOPED GAAS UNDER APPLIED ELECTRIC-FIELD - TRANSITION MECHANISM AT HIGH EXCITATION-LEVELS NEAR 77K [J].
MINAMI, T ;
YAMANISHI, M ;
KAWAMURA, T ;
KUBO, U .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (06) :1117-1125
[17]   THE INTERPRETATION OF THE PROPERTIES OF INDIUM ANTIMONIDE [J].
MOSS, TS .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1954, 67 (418) :775-782
[18]   ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS [J].
NANTO, H ;
MINAMI, T ;
SHOOJI, S ;
TAKATA, S .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) :1029-1034
[19]   BAND-GAP NARROWING IN HEAVILY DEFECT-DOPED ZNO [J].
ROTH, AP ;
WEBB, JB ;
WILLIAMS, DF .
PHYSICAL REVIEW B, 1982, 25 (12) :7836-7839
[20]   ABSORPTION-EDGE SHIFT IN ZNO THIN-FILMS AT HIGH CARRIER DENSITIES [J].
ROTH, AP ;
WEBB, JB ;
WILLIAMS, DF .
SOLID STATE COMMUNICATIONS, 1981, 39 (12) :1269-1271
123