OPTICAL-PROPERTIES OF ALUMINUM DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引:151
作者
MINAMI, T
NANTO, H
TAKATA, S
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 08期
关键词
D O I
10.1143/JJAP.24.L605
中图分类号
O59 [应用物理学];
学科分类号
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页码:L605 / L607
页数:3
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