CALCIA-STABILIZED ZIRCONIA THIN-FILMS IN GAAS METAL-INSULATOR SEMICONDUCTOR TECHNOLOGY - REDUCTION OF GAAS NATIVE OXIDE

被引：10
作者：
CROSET, M [1 ]
MERCANDALLI, LM [1 ]
SIEJKA, J [1 ]
机构：
[1] ECOLE NORM ALE SUPER,PHYS SOLIDES GRP,F-75221 PARIS 05,FRANCE
来源：
THIN SOLID FILMS | 1983年 / 103卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(83)90438-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：221 / 242
页数：22
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