OPTIMUM BEAM ENERGY FOR HIGH DEPTH RESOLUTION SECONDARY-ION MASS-SPECTROMETRY

被引：20

|

作者：

CLEGG, JB

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.579429

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：143 / 146

页数：4

相关论文

共 50 条

[1] IMPROVEMENT OF DEPTH RESOLUTION IN SECONDARY-ION MASS-SPECTROMETRY DEPTH PROFILING OF SILICIDED POLY CONTACTS
CORCORAN, SF
SOZA, D
KINCAID, N
DANIELSON, D
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01): : 230 - 233
[2] SECONDARY-ION MASS-SPECTROMETRY
ZALM, PC
VACUUM, 1994, 45 (6-7) : 753 - 772
[3] SECONDARY-ION MASS-SPECTROMETRY
GRASSERBAUER, M
CHEMIE IN UNSERER ZEIT, 1994, 28 (05) : 222 - 232
[4] SECONDARY-ION MASS-SPECTROMETRY AND ITS USE IN DEPTH PROFILING
LIEBL, H
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 385 - 391
[5] SECONDARY-ION MASS-SPECTROMETRY AND GEOLOGY
MACRAE, ND
CANADIAN MINERALOGIST, 1995, 33 : 219 - 236
[6] SECONDARY-ION MASS-SPECTROMETRY - FOREWORD
BENTZ, BL
ODOM, RW
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1995, 143 : R9 - R9
[7] SECONDARY-ION MASS-SPECTROMETRY IMAGING
ODOM, RW
APPLIED SPECTROSCOPY REVIEWS, 1994, 29 (01) : 67 - 116
[8] ESTIMATION OF THE DEPTH RESOLUTION OF SECONDARY-ION MASS-SPECTROMETRY AT THE INTERFACE SIO2/SI
KOCANDA, J
FESIC, V
VESELY, M
BREZA, J
KADLECIKOVA, M
APPLIED PHYSICS LETTERS, 1995, 67 (09) : 1206 - 1207
[9] HIGH-RESOLUTION SCANNING ION MICROSCOPY AND SECONDARY-ION MASS-SPECTROMETRY - PROBLEMS AND SOLUTIONS
LIEBL, H
SCANNING ELECTRON MICROSCOPY, 1984, : 519 - 528
[10] SECONDARY-ION MASS-SPECTROMETRY OF PARTICLE BEAMS
SANDERS, PE
RAPID COMMUNICATIONS IN MASS SPECTROMETRY, 1990, 4 (04) : 123 - 124

← 1 2 3 4 5 →