PROFILE MEASUREMENT OF OPTICALLY ROUGH SURFACES BY FIBEROPTIC INTERFEROMETRY

被引：33

作者：

HAND, DP

CAROLAN, TA

BARTON, JS

JONES, JDC

机构：

[1] Department of Physics, Heriot-Watt University, Riccarton, Edinburgh

来源：

OPTICS LETTERS | 1993年 / 18卷 / 16期

关键词：

D O I：

10.1364/OL.18.001361

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An instrument for measurement of the profiles of optically rough surfaces is described. The sensor is a robust and compact Fizeau interferometer, in which one reflection is derived from the test surface. A laser-diode source and a photodetector communicate with the sensor through an optical fiber. The optical output is demodulated with a phase-stepping algorithm, achieved by frequency modulating the source. The measured horizontal resolution was 7 mum, and the noise-limited vertical resolution was 0.3 nm/square-root Hz.

引用

页码：1361 / 1363

页数：3

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