SELECTIVE AREA GROWTH OF GALLIUM-ARSENIDE BY METALORGANIC VAPOR-PHASE EPITAXY

被引:39
作者
GHOSH, C
LAYMAN, RL
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D O I
10.1063/1.95073
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O59 [应用物理学];
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页码:1229 / 1231
页数:3
相关论文
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AZOULAY, R ;
BOUADMA, N ;
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DUGRAND, L .
JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) :229-234
[2]  
BURNHAM RB, 1982, JUN EL MAT C FT COLL
[3]  
Kim M. E., 1983, GaAs IC Symposium. IEEE Gallium Arsenide Integrated Circuit Symposium. Technical Digest 1983, P44