ELECTRON TEMPERATURES AND ELECTRON CONCENTRATIONS AT LOW-PRESSURE IN MICROWAVE INDUCED PLASMAS

被引:52
作者
BRASSEM, P [1 ]
MAESSEN, FJM [1 ]
机构
[1] UNIV AMSTERDAM,LAB ANAL CHEM,NIEUWE ACHTERGRACHT 166,AMSTERDAM,NETHERLANDS
关键词
D O I
10.1016/0584-8547(74)80024-8
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
引用
收藏
页码:203 / 210
页数:8
相关论文
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