TRENDS IN APPLICATIONS AND STRATEGIES IN THE ANALYSIS OF THIN-FILMS, INTERFACES AND SURFACES

被引：8

作者：

GARTEN, RPH ^{[1
]}

WERNER, HW ^{[1
]}

机构：

[1] VIENNA TECH UNIV,INST ALLGEMEINE PHYS,A-1040 VIENNA,AUSTRIA

来源：

ANALYTICA CHIMICA ACTA | 1994年 / 297卷 / 1-2期

关键词：

SURFACE TECHNIQUES; THIN FILMS; SURFACE ANALYSIS;

D O I：

10.1016/0003-2670(93)E0520-H

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Prominent aims and general aspects of the analysis of thin films, interfaces and surfaces are reviewed. The terminology is presented, and a limited sketch displays the major techniques important in this field. Some topical subjects in thin film analysis are identified, starting from its application for support of technology. This leads to reflections upon some trends concerning both optimization and application.

引用

页码：3 / 14

页数：12

共 50 条

[1] THE ANALYSIS OF THIN-FILMS, INTERFACES AND SURFACES - PREFACE
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WERNER, HW
ANALYTICA CHIMICA ACTA, 1994, 297 (1-2) : 1 - 1
[2] ANALYSIS OF THIN-FILMS AND INTERFACES
POATE, JM
TU, KN
PHYSICS TODAY, 1980, 33 (05) : 34 - 38
[3] RECENT PROGRESS IN THE NONDESTRUCTIVE ANALYSIS OF SURFACES, THIN-FILMS, AND INTERFACES BY SPECTROELLIPSOMETRY
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APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY): : 792 - 803
[4] ANALYSIS OF SURFACES AND THIN-FILMS
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[5] INTERACTION OF POSITRON BEAMS WITH SURFACES, THIN-FILMS, AND INTERFACES
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[8] ELEMENTAL ANALYSIS OF SURFACES AND THIN-FILMS
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[9] ION MICROPROBE ANALYSIS OF SURFACES AND THIN-FILMS - ADVANTAGES, LIMITATIONS AND APPLICATIONS
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[10] APPLICATIONS OF ENERGETIC ION-BEAMS (I) ANALYSIS OF INTERFACES AND THIN-FILMS
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BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (04): : 533 - 533

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