LIQUID-METAL ION SOURCES FOR FIB APPLICATIONS - CURRENT STATUS AND FUTURE-PROSPECTS

被引：0

作者：

PREWETT, PD

机构：

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1985年 / 537卷

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暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：126 / 136

页数：11

共 47 条

[1]

CLAMPITT R, 1978, NUCL INSTRUM METHODS, V149, P734

[2] A 100-KV ION PROBE MICROFABRICATION SYSTEM WITH A TETRODE GUN [J].

CLEAVER, JRA ;

AHMED, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1145-1148

[3]

CLEAVER JRA, 1983, MICROCIRCUIT ENG 83, P135

[4] FOCUSED ION-BEAMS IN MICROELECTRONIC FABRICATION [J].

DOHERTY, JA ;

WARD, BW ;

KELLOGG, EM .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1983, 6 (03) :329-333

[5]

DRUMOND I, 1969, P INT C ION SOURCES, P459

[6]

GAUBI H, 1982, 29TH P INT FIELD EM, P357

[7]

GOMER R, 1979, APPL PHYS, V19, P395

[8] ENERGY SPREADING IN THE HYDROGEN FIELD-IONIZATION SOURCE [J].

HANSON, GR ;

SIEGEL, BM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1176-1181

[9]

HEARD P, COMMUNICATION

[10]

KELLOGG EM, COMMUNICATION