DIRECTIONAL RF PROBE FOR MEASUREMENT OF CONDUCTIVITY OF FLOWING PLASMAS

被引：5
作者：
JAYAKUMAR, R
CHAKRAVARTHY, DP
ROHATGI, VK
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1977年 / 48卷 / 12期
关键词：
D O I：
10.1063/1.1134935
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1706 / 1709
页数：4
相关论文
共 50 条
[21]   Numerical investigation of ion collection by a planar probe in stationary and parallel flowing plasmas [J].
Zhang, Kai ;
Wang, Weizong ;
Cai, Guobiao .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2021, 54 (24)
[22]   Kinetic solution to the Mach probe problem in transversely flowing strongly magnetized plasmas [J].
Patacchini, Leonardo ;
Hutchinson, Ian H. .
PHYSICAL REVIEW E, 2009, 80 (03)
[23]   PULSED SPHERICAL PROBE MEASUREMENTS OF PLASMA CONDUCTIVITY IN A FLOWING CONTINUUM PLASMA [J].
CLEMENTS, RM ;
OLIVER, BM ;
SMY, PR .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1977, 10 (16) :2213-2224
[24]   MODELING AND MEASUREMENT OF SUBMICRON PARTICLES IN RF PLASMAS IN AR [J].
HOSOKAWA, Y ;
KITAJIMA, T ;
MAKABE, T .
AUSTRALIAN JOURNAL OF PHYSICS, 1995, 48 (03) :439-452
[25]   IMMERSION-TYPE ELECTRICAL CONDUCTIVITY PROBE FOR ANISOTROPIC PLASMAS [J].
STUBBE, EJ .
AIAA JOURNAL, 1972, 10 (01) :92-&
[26]   MEASUREMENT OF RF POTENTIAL IN A MAGNETOPLASMA BY A CAPACITIVE PROBE [J].
YATSUZUKA, M ;
MORISHITA, K ;
SATOH, K ;
NOBUHARA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (12) :1724-1725
[27]   RF Conductivity Measurement of Conductive Zell Fabric [J].
Tien Manh Nguyen ;
Chung, Jae-Young .
JOURNAL OF ELECTROMAGNETIC ENGINEERING AND SCIENCE, 2016, 16 (01) :24-28
[28]   Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas [J].
Oh, Se-Jin ;
Choi, Ik-Jin ;
Kim, Jin-Yong ;
Chung, Chin-Wook .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2012, 23 (08)
[29]   Insulated probe method using transmission line for monitoring RF plasmas [J].
Deguchi, M ;
Itatani, R .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (08) :5424-5431
[30]   Noninvasive rf probe for the study of ionization and dissociation processes in technological plasmas [J].
Law, V.J. ;
Kenyon, A.J. ;
Clary, D.C. ;
Batty, I. .
Journal of Applied Physics, 1999, 86 (08)
12345