A NEW VUV-REFLECTOMETER FOR UHV-APPLICATIONS

被引:25
作者
HOGREFE, H [1 ]
GIESENBERG, D [1 ]
HAELBICH, RP [1 ]
KUNZ, C [1 ]
机构
[1] DESY,HAMBURGER SYNCHROTRONSTRAHLUNGSLAB,D-2000 HAMBURG 52,FED REP GER
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 208卷 / 1-3期
关键词
D O I
10.1016/0167-5087(83)91160-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
REFLECTOMETERS
引用
收藏
页码:415 / 418
页数:4
相关论文
共 12 条
[1]   UHV APPLICATION OF SPRING-LOADED TEFLON SEALS [J].
AUERBACH, DJ ;
BECKER, CA ;
COWIN, JP ;
WHARTON, L .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (11) :1518-1519
[2]   GRAZING INCIDENCE VACUUM ULTRAVIOLET MONOCHROMATOR WITH FIXED EXIT SLIT [J].
DIETRICH, H ;
KUNZ, C .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (03) :434-&
[3]   AUTOMATIC CONCENTRIC SHAFT REFLECTOMETER FOR USE IN VACUUM UV [J].
EMERSON, LC ;
COX, JT ;
OSTROM, GL ;
PAINTER, LR ;
CUNNINGHAM, GH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1976, 47 (09) :1065-1068
[4]   MULTILAYER INTERFERENCE MIRRORS FOR XUV RANGE AROUND 100 EV PHOTON ENERGY [J].
HAELBICH, RP ;
KUNZ, C .
OPTICS COMMUNICATIONS, 1976, 17 (03) :287-292
[5]   EFFICIENCY OF HOLOGRAPHIC LAMINAR GRATINGS AND RULED BLAZED GRATINGS IN WAVELENGTH RANGE 55-560-A [J].
HAELBICH, RP ;
KUNZ, C ;
RUDOLPH, D ;
SCHMAHL, G .
NUCLEAR INSTRUMENTS & METHODS, 1978, 152 (01) :127-131
[6]  
HAELBICH RP, 1977, PHYS DATA ZAED KARLS, V8
[7]  
HAGEMANN HJ, 1975, J OPT SOC AM, V65, P742, DOI 10.1364/JOSA.65.000742
[8]   ON CAUSE OF ERRORS IN REFLECTANCE VS ANGLE OF INCIDENCE MEASUREMENTS AND DESIGN OF REFLECTOMETERS TO ELIMINATE ERRORS [J].
HUNTER, WR .
APPLIED OPTICS, 1967, 6 (12) :2140-&
[9]  
JARK W, 1982, UNPUB SRI C HAMBURG
[10]  
POLASCHEGG HD, 1975, VAKUUM-TECH, V24, P136