ON THE REDUCTION IN QUALITY FACTOR OF THE PIEZOELECTRIC THIN-FILM ON SEMICONDUCTOR COMPOSITE RESONATOR DUE TO RADIATION INTO THE BULK SEMICONDUCTOR

被引：0

作者：

STEVENS, DS ^{[1
]}

TIERSTEN, HF ^{[1
]}

SHICK, DV ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,TROY,NY 12181

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1986年 / 33卷 / 01期

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

页码：92 / 93

页数：2

共 50 条

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