BEAM EFFECTS IN AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF TITANIUM-OXIDE FILMS

被引：92

作者：

MATHIEU, HJ ^{[1
]}

MATHIEU, JB ^{[1
]}

MCCLURE, DE ^{[1
]}

LANDOLT, D ^{[1
]}

机构：

[1] SWISS FED INST TECHNOL,DEPT MAT,CH-1007 LAUSANNE,SWITZERLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 04期

关键词：

D O I：

10.1116/1.569313

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1023 / 1028

页数：6

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