SEED SELECTION THROUGH ION CHANNELING TO MODIFY CRYSTALLOGRAPHIC ORIENTATIONS OF POLYCRYSTALLINE SI FILMS ON SIO2 - IMPLANT ANGLE DEPENDENCE

被引：17
作者：
KUNG, KTY
IVERSON, RB
REIF, R
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 07期
关键词：
D O I：
10.1063/1.95529
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：683 / 685
页数：3
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