PHOSPHORUS IMPLANTATION IN TITANIUM - APPLICATION TO CALIBRATION ANALYSIS

被引:8
作者
FERDJANI, S
DAVID, D
BERANGER, G
FARKAS, D
HILD, S
GARCIA, EA
机构
[1] VIRGINIA POLYTECH INST & STATE UNIV,BLACKSBURG,VA 24061
[2] COMIS NACL ENERGIA ATOM,DEPT CIENCIAS MAT,RA-1429 BUENOS AIRES,DF,ARGENTINA
关键词
D O I
10.1016/0925-8388(91)90080-F
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The aim of this work is to describe some comparative analyses of implanted phosphorus in titanium by using different techniques: secondary ion mass spectroscopy, glow discharge optical spectroscopy and electron spectroscopy for chemical analysis-X-ray photoelectron spectroscopy. The amount of phosphorus was measured vs. depth. Mathematical simulation of the implantation process permitted the adoption of absolute units for concentration calibration. The use of these samples as standards for nuclear analysis is discussed. The main purpose of this use is to study phosphorus incorporation in titanium oxides prepared in phosphoric baths.
引用
收藏
页码:265 / 272
页数:8
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