A CLEAN ROOM FOR PRODUCTION OF SILICON PLANAR TRANSISTORS

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作者：

CORKE, RL

SEARLS, AW

机构：

来源：

POST OFFICE ELECTRICAL ENGINEERS JOURNAL | 1966年 / 59卷

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TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：34 / &

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