EFFECT OF THE H2O/TEOS RATIO UPON THE PREPARATION AND NITRIDATION OF SILICA SOL-GEL FILMS

被引：40

作者：

GLASER, PM

PANTANO, CG

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1984年 / 63卷 / 1-2期

关键词：

D O I：

10.1016/0022-3093(84)90400-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：209 / 221

页数：13

共 9 条

[1]

BRINKER CJ, 1982, J AM CERAM SOC, V65, pC4, DOI 10.1111/j.1151-2916.1982.tb09926.x

[2] SOL-GEL TRANSITION IN SIMPLE SILICATES [J].

BRINKER, CJ ;

KEEFER, KD ;

SCHAEFER, DW ;

ASHLEY, CS .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1982, 48 (01) :47-64

[3] DEHYDROXYLATION OF POROUS-GLASS BY MEANS OF CHLORINE [J].

ELMER, TH .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1981, 64 (03) :150-154

[4] NITRIDATION OF SILICON AND OXIDIZED-SILICON [J].

HAYAFUJI, Y ;

KAJIWARA, K .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (09) :2102-2108

[5] DIRECT THERMAL NITRIDATION OF SILICON DIOXIDE FILMS IN ANHYDROUS AMMONIA GAS [J].

ITO, T ;

NOZAKI, T ;

ISHIKAWA, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (09) :2053-2057

[6] INFRARED STUDIES OF REACTIONS ON OXIDE SURFACES .5. LEWIS ACID SITES ON DEHYDROXYLATED SILICA [J].

MORROW, BA ;

CODY, IA .

JOURNAL OF PHYSICAL CHEMISTRY, 1976, 80 (18) :1995-1998

[7] PHYSICAL AND CHEMICAL SOLUBILITY OF NITROGEN IN GLASS MELTS [J].

MULFINGER, HO .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (09) :462-+

[8]

PANTANO CG, 1984, ULTRASTRUCTURE PROCE

[9] INFRARED STUDY OF OH AND NH2 GROUPS ON SURFACE OF A DRY SILICA AEROGEL [J].

PERI, JB .

JOURNAL OF PHYSICAL CHEMISTRY, 1966, 70 (09) :2937-&

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