EFFECT OF THE H2O/TEOS RATIO UPON THE PREPARATION AND NITRIDATION OF SILICA SOL-GEL FILMS

被引：40
|
作者：
GLASER, PM
PANTANO, CG
机构：
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1984年 / 63卷 / 1-2期
关键词：
D O I：
10.1016/0022-3093(84)90400-9
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：209 / 221
页数：13
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