QUANTITATIVE-ANALYSIS OF COVERAGE AND ORIENTATION OF ORGANIC FILMS ON SEMICONDUCTOR AND INSULATOR SUBSTRATES USING INFRARED EXTERNAL REFLECTION SPECTROSCOPY

被引:0
|
作者
ALLARA, DL [1 ]
PORTER, MD [1 ]
机构
[1] BELL COMMUN RES,MURRAY HILL,NJ 07974
来源
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1987年 / 193卷
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中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
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页码:54 / ANYL
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