NEW GRAZING-INCIDENCE X-RAY-DIFFRACTION METHODS FOR SUPERLATTICE INVESTIGATION

被引：0
作者：
IMAMOV, RM
LOMOV, AA
NOVIKOV, DV
机构：
[1] Institute of Crystallography, Academy of Sciences of the Ussr
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1991年 / 127卷 / 02期
关键词：
D O I：
10.1002/pssa.2211270203
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Grazing-incidence diffraction in the asymmetric coplanar Bragg and inclined Bragg-Laue geometries is applied for investigation of semiconductor superlattices (SL). It is shown, that the coplanar Bragg diffraction can be used for express control of SL parameters, while the inclined Bragg-Laue diffraction provides depth-resolving information on the SL structure. The processes of satellite formation are investigated.
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页码：313 / 319
页数：7
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