共 15 条
[1]
EVALUATION OF THE SURFACE CONCENTRATION OF DIFFUSED LAYERS IN SILICON
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BELL SYSTEM TECHNICAL JOURNAL,
1958, 37 (03)
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[3]
CARSLAW HS, 1959, CONDUCTION HEAT SOLI, P484
[4]
CRANK J, 1957, MATH DIFFUSION, P11
[5]
RELATION BETWEEN SURFACE CONCENTRATION AND AVERAGE CONDUCTIVITY IN DIFFUSED LAYERS IN GERMANIUM
[J].
BELL SYSTEM TECHNICAL JOURNAL,
1961, 40 (02)
:509-+
[7]
ACCURACY OF 4-PROBE RESISTIVITY MEASUREMENTS ON SILICON
[J].
BRITISH JOURNAL OF APPLIED PHYSICS,
1962, 13 (05)
:231-&
[8]
RESISTIVITY OF BULK SILICON AND OF DIFFUSED LAYERS IN SILICON
[J].
BELL SYSTEM TECHNICAL JOURNAL,
1962, 41 (02)
:387-+
[10]
AN AC BRIDGE FOR SEMICONDUCTOR RESISTIVITY MEASUREMENTS USING A 4-POINT PROBE
[J].
BELL SYSTEM TECHNICAL JOURNAL,
1961, 40 (03)
:885-+