SOLID-PHASE REACTIONS OF A POLYCRYSTALLINE SILICON FILM WITH AN OVERLAPPING ALUMINUM FILM

被引：8

作者：

FUKUDA, Y

KOHDA, S

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 01期

关键词：

D O I：

10.1063/1.93728

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：68 / 70

页数：3

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