EFFECT OF PULSE BIAS VOLTAGE ON ZrN COATINGS BY CATHODIC VACUUM ARC

被引：0
|
作者：
Gunduz, Oguzhan [1 ]
Oktar, Faik
Salman, Serdar [1 ,2 ]
机构：
[1] Marmara Univ, Tekn Egitim Fak, Metal Egitimi Bolumu, Istanbul, Turkey
[2] Marmara Univ, Muhendisl Fak, Endustri Muhendisligi Bolumu, Istanbul, Turkey
来源：
SIGMA JOURNAL OF ENGINEERING AND NATURAL SCIENCES-SIGMA MUHENDISLIK VE FEN BILIMLERI DERGISI | 2005年 / 23卷 / 03期
关键词：
CVA; Adhesion; ZrN; Pulse bias voltage; Thin film;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this study, production and characterization of ZrN coatings by cathodic vacuum arc technique under pulse bias voltages are investigated. ZrN thin film coatings were applied on the High Speed Steel (HSS) samples, which were heat treated before coating. The coating thickness, surface roughness, elastic modulus, microhardness and adhesion strength (Scratch and Rockwell C) were also determined, and the data were evaluated after X-Ray analysis. As a result, 200 pulse voltage was found as a good combination for ZrN coating.
引用
收藏
页码：49 / 57
页数：9
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