MATHEMATICAL-DESCRIPTION OF MACROKINETICS OF SILICON DEPOSITION FROM GAS-PHASE

被引：0

|

作者：

GAYEV, EA

ASATURYAN, AS

MALOROSSIYANOV, VS

DEVYATKIN, BD

机构：

来源：

RUSSIAN METALLURGY | 1976年 / 03期

关键词：

D O I：

暂无

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

收藏

页码：49 / 53

页数：5

相关论文

共 50 条

[21] THE ROLE OF SILANE GAS-PHASE CHEMISTRY IN SILICON FILM DEPOSITION AND PARTICLE NUCLEATION
MORRISON, PW
REIMER, JA
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1986, 192 : 158 - COLL
[22] In situ optical diagnostics of silicon chemical vapor deposition gas-phase processes
Maslar, JE
Hurst, WS
CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 2003, 683 : 748 - 752
[23] Silicon Production from SiO Gas via Gas-Phase Reactions
Dalaker, Halvor
REWAS 2022: ENERGY TECHNOLOGIES AND CO2 MANAGEMENT (VOL II), 2022, : 33 - 40
[24] MATHEMATICAL SIMULATION OF GAS-PHASE DEPOSITION OF EPITAXIAL SILICON FILMS IN THE SI-C-H AND SI-H SYSTEMS
MINKINA, VG
RUSSIAN CHEMICAL BULLETIN, 1995, 44 (07) : 1171 - 1176
[25] FEATURES OF THE MACROKINETICS OF GAS-PHASE REACTIONS INDUCED BY THE THERMAL EFFECT OF OPTICAL RADIATION
KALINICHENKO, MI
TROFIMOV, VA
IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1991, 55 (06): : 1211 - 1215
[26] MATHEMATICAL-DESCRIPTION OF PHASE-EQUILIBRIUM AND STRUCTURE OF CONCENTRATION SPACE OF POLYAZEOTROPIC MIXTURES
AVETYAN, VS
KARP, LE
PETLYUK, FB
SERAFIMOV, LA
ZHURNAL FIZICHESKOI KHIMII, 1978, 52 (10): : 2471 - 2474
[27] GAS-PHASE DEPOSITION OF INSULATING FILMS
GREGOR, LV
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (08) : C239 - &
[28] MATHEMATICAL-DESCRIPTION OF THE SYNTHESIS OF METHACRYLIC-ACID FROM METHACRYLAMIDE SULFATE
DANOV, SM
SLOBODOV, EB
OBMELYUKHINA, TN
TOMASHCHUK, VI
JOURNAL OF APPLIED CHEMISTRY OF THE USSR, 1981, 54 (11): : 2224 - 2227
[29] PHOTOCHEMICAL GENERATION AND DEPOSITION OF COPPER FROM A GAS-PHASE PRECURSOR
JONES, CR
HOULE, FA
KOVAC, CA
BAUM, TH
APPLIED PHYSICS LETTERS, 1985, 46 (01) : 97 - 99
[30] KINETICS OF DEPOSITION OF TIN DIOXIDE FILMS FROM THE GAS-PHASE
BARYSHNIKOV, YY
ZAKHAROV, IL
KINETICS AND CATALYSIS, 1990, 31 (05) : 989 - 994

← 1 2 3 4 5 →