MATHEMATICAL-DESCRIPTION OF MACROKINETICS OF SILICON DEPOSITION FROM GAS-PHASE

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作者：

GAYEV, EA

ASATURYAN, AS

MALOROSSIYANOV, VS

DEVYATKIN, BD

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来源：

RUSSIAN METALLURGY | 1976年 / 03期

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中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

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页码：49 / 53

页数：5

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