REGENERATION OF HIGH-VACUUM CRYOPUMPS

被引:0
|
作者
EHMANN, J
机构
关键词
SEMICONDUCTOR DEVICE MANUFACTURE;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Cryopumping has come to the forefront as the fastest growing high vacuum pumping mechanism. With the major advantages of cryopumping, however, also comes the necessity of addressing the specifics of its operation to ensure optimum performance. One of the most overemphasized and misunderstood aspects of the cryopump has been regeneration. Even after years of usage, for many users, regeneration is still mysterious. This article explains the process of regeneration and answers the question of why, when, and how to regenerate a cryopump.
引用
收藏
页码:235 / 239
页数:5
相关论文
共 50 条
  • [41] High-vacuum dewatering of newsprint
    AES Engineered Systems, P.O. Box 7010, Queensbury, NY 12804, United States
    TAPPI J, 9 (153-157):
  • [42] A HIGH-VACUUM EXTRACTION TECHNIQUE
    ANDERSON, CA
    LEEDER, JD
    CHEMISTRY & INDUSTRY, 1965, (11) : 462 - &
  • [43] HIGH-VACUUM ION SOURCE
    PYTEVA, MB
    SPIVAK, GV
    DUBININA, EM
    SOVIET PHYSICS-TECHNICAL PHYSICS, 1964, 9 (01): : 110 - &
  • [44] High-vacuum dewatering of newsprint
    Neun, JA
    TAPPI JOURNAL, 1996, 79 (09): : 153 - 157
  • [45] A HIGH-VACUUM PORTABLE EXSICCATOR
    PENGO, R
    ZIOMI, L
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 245 (01): : 205 - 206
  • [46] DEVELOPMENTS IN HIGH-VACUUM PUMPS
    WESTON, GF
    PHYSICS IN TECHNOLOGY, 1984, 15 (01): : 37 - 44
  • [47] ACHIEVEMENTS OF HIGH-VACUUM METROLOGY
    GULYAEV, MA
    ERYUKHIN, AV
    MEASUREMENT TECHNIQUES-USSR, 1967, (11): : 1361 - &
  • [48] LARGE HIGH-VACUUM JOINTS
    BALITSKI.AV
    FILATOVS.LA
    SHUVALOV, AS
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES-USSR, 1971, 14 (01): : 205 - &
  • [49] HIGH-VACUUM INDIUM SHUTTER
    DRUBETSKOI, ER
    TOLSTIKHIN, IN
    ZAVODSKAYA LABORATORIYA, 1975, 41 (08): : 997 - 998
  • [50] INEXPENSIVE HIGH-VACUUM FEEDTHROUGHS
    GERBER, S
    POST, D
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (03): : 341 - 342