CONDUCTIVITY OF THIN-LAYERS OF NITROGENIZED OXIDE

被引：0

作者：

OKHONIN, SA

BIRYUKOV, SA

FRANTSUZOV, AA

机构：

来源：

SOVIET MICROELECTRONICS | 1985年 / 14卷 / 02期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：66 / 69

页数：4

共 11 条

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