COHERENT PRECIPITATION OF SILICON-NITRIDE IN SILICON

被引：12

作者：

KAUSHIK, VS

DATYE, AK

KENDALL, DL

MARTINEZTOVAR, B

MYERS, DR

机构：

[1] UNIV NEW MEXICO,DEPT ELECT & COMP ENGN,ALBUQUERQUE,NM 87131

[2] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 21期

关键词：

D O I：

10.1063/1.99722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1782 / 1784

页数：3

共 8 条

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