CHEMICAL VAPOR-DEPOSITION OF RUTILE FILMS

被引:33
作者
HAYASHI, S [1 ]
HIRAI, T [1 ]
机构
[1] TOHOKU UNIV,IRON STEEL & OTHER MET RES INST,SENDAI,MIYAGI 980,JAPAN
关键词
D O I
10.1016/0022-0248(76)90228-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:157 / 164
页数:8
相关论文
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