COMPUTER-SIMULATION OF DAMAGE DEPTH PROFILES FOR 2-7.5 MEV/AMU HEAVY-IONS INCIDENT ON PURE METALS WITH EXPERIMENTAL COMPARISONS

被引：38

作者：

ARUGA, T ^{[1
]}

NAKATA, K ^{[1
]}

TAKAMURA, S ^{[1
]}

机构：

[1] HITACHI LTD,HITACHI RES LAB,HITACHI 317,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90673-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：748 / 751

页数：4

共 15 条

[1] STOPPING POWER AND EFFECTIVE CHARGE OF HEAVY-IONS IN SOLIDS [J].

ANTHONY, JM ;

LANFORD, WA .

PHYSICAL REVIEW A, 1982, 25 (04) :1868-1879

[2]

BRICE DK, 1975, ION IMPLANTATION RAN, V1

[3] INFLUENCE OF ELECTRONIC STRAGGLING ON ION RANGE DISTRIBUTIONS [J].

COWERN, NEB .

PHYSICS LETTERS A, 1981, 82 (04) :200-202

[4] ADAPTATION OF A PROGRAM FOR DEPTH DISTRIBUTION OF ENERGY DEPOSITION BY ION-BOMBARDMENT - BETTER STOPPING POWERS [J].

DAVISSON, CM ;

MANNING, I .

COMPUTER PHYSICS COMMUNICATIONS, 1986, 42 (01) :137-147

[5] RESULTS OF ION-IMPLANTATION INTO SILICON IN THE 100 MEV RANGE .1. OXYGEN AND BORON IMPLANTATION [J].

FAHRNER, WR ;

HEIDEMANN, K ;

SCHOTTLE, P .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 70 (02) :463-472

[6]

Land D. J., 1978, Atomic Data and Nuclear Data Tables, V22, P235, DOI 10.1016/0092-640X(78)90016-5

[7]

LINDHARD J, 1963, VIDENSK SELSK MAT FY, V33

[8]

LINDHARD J, 1968, VIDENSK SELSK MAT FY, V33

[9]

LITTMARK U, 1980, STOPPING RANGES IONS, V6

[10] DEPTH DISTRIBUTION OF ENERGY DEPOSITION BY ION-BOMBARDMENT [J].

MANNING, I ;

MUELLER, GP .

COMPUTER PHYSICS COMMUNICATIONS, 1974, 7 (02) :85-94

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