REAL-TIME DISPLACEMENT MEASUREMENT USING A MULTICAMERA PHASE-STEPPING SPECKLE INTERFEROMETER

被引:78
作者
VANHAASTEREN, AJP
FRANKENA, HJ
机构
[1] Department of Applied Physics, Delft University of Technology, GA Delft, 2600
关键词
D O I
10.1364/AO.33.004137
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Surface point displacements can be measured by using standard phase-stepping speckle interferometry, but the measured data are vulnerable to disturbances during the interferogram recordings. To overcome this an interferometer with a computational system has been developed to record three phase-stepped interferograms simultaneously and to calculate displacements. This system is evaluated by measurements of the out-of-plane rotation of a flat surface. The surface displacement is calculated at a rate of 25 times/s. If one reduces noise by filtering, hardware limitations decrease the speed to 12.5 displacement calculations/s. With this system displacements can be measured with an accuracy exceeding lambda/55 if filtering is applied.
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页码:4137 / 4142
页数:6
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