PREPARATION AND OPTICAL WAVE-GUIDE PROPERTIES OF LINBO3 THIN-FILMS BY RF MAGNETRON SPUTTERING

被引：34

作者：

SHIMIZU, M

FURUSHIMA, Y

NISHIDA, T

SHIOSAKI, T

机构：

[1] Department of Electronics, Kyoto University, Sakyo-ku, Kyoto, 606, Yoshida Honmachi

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期

关键词：

LINBO3; FILM; C-AXIS ORIENTED; ZNO; PT; BUFFER LAYER; SINGLE CRYSTAL; AMORPHOUS AND SINGLE-CRYSTALLINE SUBSTRATES; RF MAGNETRON SPUTTERING; OPTICAL PROPAGATION LOSS; EFFECTIVE REFRACTIVE INDEX;

D O I：

10.1143/JJAP.32.4111

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

C-axis-oriented LiNbO3 filMS were successfully obtained on ZnO/SiO2/Si, ZnO/glass and Pt/SiO2/Si substrates at substrate temperatures higher than 450-degrees-C by RF magnetron sputtering. LiNbO3 filMS were also grown epitaxially on alpha-Al2O3(001), (012) and (110) and LiTaO3(110) substrates at substrate temperatures higher than 650-degrees-C. The minimum optical propagation loss of the films was 6.47 dB/cm (TE0 mode) for the LiNbO3 film on LiTaO3. An improvement in the optical propagation loss after annealing treatment was observed.

引用

页码：4111 / 4114

页数：4

共 9 条

[1] LIQUID-PHASE EPITAXY OF LINBO3 THIN-FILMS FOR INTEGRATED OPTICS [J].