PREPARATION OF III-V COMPOUND SEMICONDUCTORS BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

被引：8
作者：
BIEFELD, RM
机构：
来源：
INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT | 1982年 / 21卷 / 04期
关键词：
D O I：
10.1021/i300008a001
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：525 / 528
页数：4
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