EFFECT OF DISCHARGE CONDITIONS ON CHARACTERISTICS OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY DC GLOW-DISCHARGE DECOMPOSITION

被引：8

作者：

JANG, J

LEE, C

机构：

来源：

SOLAR ENERGY MATERIALS | 1982年 / 7卷 / 03期

关键词：

D O I：

10.1016/0165-1633(82)90012-0

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：377 / 384

页数：8

共 9 条

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[9]

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