ACHROMATIC 2-STAGE EXB MASS FILTER FOR A FOCUSED ION-BEAM COLUMN WITH COLLIMATED BEAM

被引：7
作者：
TEICHERT, J [1 ]
TIUNOV, MA [1 ]
机构：
[1] NOVOSIBIRSK NUCL RES INST, NOVOSIBIRSK, RUSSIA
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 1993年 / 4卷 / 07期
关键词：
D O I：
10.1088/0957-0233/4/7/007
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A two-stage achromatic E x B mass separator has been designed for a high-current focused ion beam column with collimated beam. The separator consists of two homogeneous field E x B filters, a stigmator and the separation aperture. The second-order geometrical and chromatic aberration coefficients are derived and their dependence on magnetic pole piece and electrode geometry are investigated in performing electric and magnetic field calculations. The influence of the mass separator on the spatial resolution of the column is discussed.
引用
收藏
页码：754 / 763
页数：10
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