SOLID SOLUBILITY OF SIC IN BETA-SI3N4

被引：3

作者：

KANDORI, T ^{[1
]}

KAMIYA, N ^{[1
]}

KAMIGAITO, O ^{[1
]}

机构：

[1] TOYOTA CENT RES & DEV LABS INC,SHOWA KU,NAGOYA,JAPAN

来源：

关键词：

D O I：

10.1143/JJAP.14.137

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：137 / 138

页数：2

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