FEW COLLISIONS APPROACH FOR THRESHOLD SPUTTERING

被引：77

作者：

YAMAMURA, Y

BOHDANSKY, J

机构：

来源：

VACUUM | 1985年 / 35卷 / 12期

关键词：

D O I：

10.1016/0042-207X(85)90316-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：561 / 571

页数：11

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[9] THEORETICAL-STUDIES ON AN EMPIRICAL-FORMULA FOR SPUTTERING YIELD AT NORMAL INCIDENCE [J].

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[10]

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