ADHESION AND DEFORMATION OF METAL POLYIMIDE LAYERED STRUCTURES

被引：55

作者：

FAUPEL, F ^{[1
]}

YANG, CH ^{[1
]}

CHEN, ST ^{[1
]}

HO, PS ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1063/1.342903

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1911 / 1917

页数：7

共 12 条

[1]

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[2]

CHEN ST, 1988, J APPL PHYS, V64, P6695

[3]

George E, 1976, DIETER MECH METALLUR, V2

[4] DIRECT MEASUREMENTS OF THE SURFACE ENERGIES OF CRYSTALS [J].

GILMAN, JJ .

HO, PS ;

FAUPEL, F .

[6]

HU CK, 1985, 2ND P INT MULT INT C, P187

[7]

KIM KS, 1988, T ASME, V110, P266

[8]

MITTL KL, 1976, ASTM SPECIAL TECHNIC, V640

[9]

PETCH NJ, 1953, J IRON STEEL I, V174, P25

[10]

Terasawa M., 1983, International Journal for Hybrid Microelectronics, V6, P607