UV LIGHT-INDUCED DEPOSITION OF COPPER-FILMS

被引：5
|
作者：
ESROM, H [1 ]
WAHL, G [1 ]
KOGELSCHATZ, U [1 ]
机构：
[1] CORP RES BADEN, BADEN, SWITZERLAND
来源：
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
关键词：
D O I：
10.1051/jphyscol:1989585
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：719 / 725
页数：7
相关论文
共 50 条
  • [1] EXCIMER LASER-INDUCED DEPOSITION OF COPPER-FILMS
    BABU, SV
    PADIYATH, R
    DAVID, M
    WALSH, L
    AICHE JOURNAL, 1991, 37 (01) : 150 - 154
  • [2] DIRECT DEPOSITION OF PATTERNED COPPER-FILMS ON PTFE
    KODAS, TT
    HAMPDENSMITH, MJ
    RYE, RR
    PLATING AND SURFACE FINISHING, 1992, 79 (06): : 71 - 73
  • [3] DIRECT DEPOSITION OF PATTERNED COPPER-FILMS ON TEFLON
    PERRY, WL
    CHI, KM
    KODAS, T
    HAMPDENSMITH, M
    RYE, R
    APPLIED SURFACE SCIENCE, 1993, 69 (1-4) : 94 - 100
  • [4] DEPOSITION OF COPPER-FILMS BY UNBALANCED DC MAGNETRON SPUTTERING
    MUSIL, J
    BELL, AJ
    CEPERA, M
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1995, 45 (03) : 249 - 261
  • [5] THE DEPOSITION AND ADHESION OF COPPER-FILMS ON SMOOTH POLYMER SURFACES
    EISCH, JJ
    LASKOWSKI, J
    BIELINSKI, J
    BOLESLAWSKI, MP
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1995, 14 (02) : 146 - 147
  • [6] ANOMALOUS LIGHT-ABSORPTION IN THIN COPPER-FILMS
    SHKLYAREVSKII, IN
    USOSKIN, AI
    ESSIGKE, I
    OPTIKA I SPEKTROSKOPIYA, 1975, 38 (05): : 1006 - 1012
  • [7] Preparation of low-dimensional conducting polymer films by UV light-induced deposition with excimer laser beams
    Nishio, S
    Matsuzaki, A
    Sato, H
    SYNTHETIC METALS, 1997, 84 (1-3) : 367 - 368
  • [8] UV LIGHT-INDUCED ETHYLENE POLYMERIZATION
    PULLUKAT, TJ
    MAKROMOLEKULARE CHEMIE-MACROMOLECULAR CHEMISTRY AND PHYSICS, 1975, 176 (08): : 2479 - 2480
  • [9] DEPOSITION OF COPPER-FILMS ON SILICON SUBSTRATES - FILM PURITY AND SILICIDE FORMATION
    PADIYATH, R
    SETH, J
    BABU, SV
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (05) : 2326 - 2332
  • [10] ON THE TEXTURE OF ELECTROLESS COPPER-FILMS
    JUNGINGER, R
    ELSNER, G
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (09) : 2304 - 2308
12345