PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS

被引：1002
作者：
CONRAD, JR
RADTKE, JL
DODD, RA
WORZALA, FJ
TRAN, NC
机构：
[1] UNIV WISCONSIN,DEPT MET ENGN,MADISON,WI 53706
[2] UNIV WISCONSIN,CTR MAT SCI,MADISON,WI 53706
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 11期
关键词：
D O I：
10.1063/1.339055
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4591 / 4596
页数：6
相关论文
共 31 条
[1]  
[Anonymous], 1963, KGL DANSKE VIDENSKAB
[2]  
Conrad J.R., 1986, B AM PHYS SOC, V31, P1479
[3]   SHEATH THICKNESS AND POTENTIAL PROFILES OF ION-MATRIX SHEATHS FOR CYLINDRICAL AND SPHERICAL ELECTRODES [J].
CONRAD, JR .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) :777-779
[4]  
CONRAD JR, 1987, 1987 IEEE INT C PLAS, P124
[5]  
CONRAD JR, 1986, 39TH ANN GAS EL C MA, P75
[6]  
CONRAD JR, 1986, 1986 IEEE INT C PLAS, P28
[7]  
CONRAD JR, 1987, METHOD APPARATUS PLA
[8]   ADHESIVE AND ABRASIVE WEAR MECHANISMS IN ION-IMPLANTED METALS [J].
DEARNALEY, G .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :158-165
[9]   WEAR-RESISTANCE OF NITROGEN-IMPLANTED STEELS [J].
DIMIGEN, H ;
KOBS, K ;
LEUTENECKER, R ;
RYSSEL, H ;
EICHINGER, P .
MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :181-190
[10]   SURFACE MICROANALYTICAL STUDIES OF NITROGEN ION-IMPLANTED STEEL [J].
DODD, CG ;
MEEKER, GP ;
BAUMANN, SM ;
NORBERG, JC ;
LEGG, KO .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :219-227
1234