USE OF A FAST ATOM BEAM IN ION MICROSCOPY (FABIM) FOR ANALYSIS OF POORLY CONDUCTING MATERIALS

被引:17
作者
DEGREVE, F
LANG, JM
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D O I
10.1002/sia.740070405
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:177 / 187
页数:11
相关论文
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