LOW-ENERGY (LESS-THAN-OR-EQUAL-TO-100 EV) SPUTTERING OF THIN MOLYBDENUM NITRIDE FILMS

被引：10
作者：
BALDWIN, DA
SHAMIR, N
HOCHMANN, P
RABALAIS, JW
机构：
来源：
SURFACE SCIENCE | 1983年 / 130卷 / 02期
关键词：
D O I：
10.1016/0039-6028(83)90367-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：361 / 372
页数：12
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