INTERFACE MODIFICATIONS FOR IMPROVING THE ADHESION OF ALPHA-C-H FILMS TO METALS

被引：57

作者：

GRILL, A ^{[1
]}

MEYERSON, B ^{[1
]}

PATEL, V ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1557/JMR.1988.0214

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：214 / 218

页数：5

共 12 条

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