PROPERTIES OF NBN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

被引：2
|
作者：
HOTOVY, I [1 ]
HURAN, J [1 ]
机构：
[1] SLOVAK ACAD SCI, INST ELECT ENGN, CS-84228 BRATISLAVA, CZECHOSLOVAKIA
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1993年 / 137卷 / 01期
关键词：
D O I：
10.1002/pssa.2211370132
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K25 / K28
页数：4
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