HIGH-TEMPERATURE OXIDATION OF SILICON-NITRIDE

被引：2
作者：
PUGACH, EA
机构：
来源：
THERMOCHIMICA ACTA | 1985年 / 93卷 / SEP期
关键词：
D O I：
10.1016/0040-6031(85)85176-5
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
引用
收藏
页码：701 / 704
页数：4
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