HIGH-TEMPERATURE OXIDATION OF SILICON-NITRIDE

被引：2

|

作者：

PUGACH, EA

机构：

来源：

THERMOCHIMICA ACTA | 1985年 / 93卷 / SEP期

关键词：

D O I：

10.1016/0040-6031(85)85176-5

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

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页码：701 / 704

页数：4

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