CHEMICAL-PROCESSING WITH LASERS - RECENT DEVELOPMENTS

被引：28

作者：

BAUERLE, D

机构：

来源：

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY | 1988年 / 46卷 / 03期

关键词：

D O I：

10.1007/BF00692884

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：261 / 270

页数：10

共 25 条

[1]

Bauerle D., 1983, Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium, P19

[2]

BAUERLE D, 1985, LASER OPTOELECTRONIK, V1, P29

[3]

Bauerle D., 1984, SPRINGER SER CHEM PH, V39, P166

[4]

BAUERLE D, 1986, SPRINGER SER MATER S, V1

[5]

BAUERLE D, 1984, SPRINGER SER CHEM PH, V39

[6]

DOPPELBAUER J, 1987, NATO ASI SER, P277

[7] EXCIMER-LASER-INDUCED ETCHING OF CERAMIC PBTI1-XZRXO3 [J].

EYETT, M ;

BAUERLE, D ;

WERSING, W ;

THOMANN, H .

[8]

Eyett M., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V801, P156

EYETT, M ;

BAUERLE, D .

[10]

EYETT M, 1988, IN PRESS FERROELECTR