MODIFICATION OF SURFACE-MORPHOLOGY OF SOLIDS BY ION-BEAM SPUTTERING

被引：5

|

作者：

KOWALSKI, ZW

机构：

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1987年 / 6卷 / 09期

关键词：

D O I：

10.1007/BF01729139

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：1083 / 1085

页数：3

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