DETERMINATION OF ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN SURFACE-WAVE PRODUCED PLASMAS .1. MODELING

被引：41

作者：

KORTSHAGEN, U ^{[1
]}

SCHLUTER, H ^{[1
]}

SHIVAROVA, A ^{[1
]}

机构：

[1] UNIV SOFIA,FAC PHYS,BU-1126 SOFIA,BULGARIA

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1991年 / 24卷 / 09期

关键词：

D O I：

10.1088/0022-3727/24/9/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

For surface wave produced argon plasmas in the 60-180 MHz range, electron energy distribution functions are calculated from the electron Boltzmann equation solved in the Lorentz approximation. Breakdown and maintenance field strengths are determined self-consistently by satisfying additional balance equations. The influence of space charge fields and the limits of the approximations used are discussed.

引用

页码：1571 / 1584

页数：14

共 27 条

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