INFLUENCE OF ENERGY-TRANSFER IN NUCLEAR COLLISIONS ON THE ION-BEAM ANNEALING OF AMORPHOUS LAYERS IN SILICON

被引：19
作者：
HOLMEN, G
LINNROS, J
SVENSSON, B
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 10期
关键词：
D O I：
10.1063/1.95037
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1116 / 1118
页数：3
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